Ellipsometry and Polarized Light R M A Azzam, N M Bashara
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The polarization of scattered light can often indicate the source of that scattered light. For aiming at the disadvantages of spectroscopic ellipsometers and the requirements of in-situ and real time measurement, in this dissertation the heterodyne inteferometric ellipsometry are studied systematically. Bashara: Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987) 2nd ed., Chap. Mechanism of nonlinear frequency mixing error and its influence on measurement accuracy are studied synthetically, it is mainly caused by the imperfection of polarizing beam splitters (PBS), the elliptical polarization and non-orthogonality of light beams. Bashara: Ellipsometry and Polarized Light (Elsevier, Amsterdam, 1987). Ellipsometry is a sensitive optical technique for determining properties of surfaces and thin films. An ellipsometry system can be even more sensitive. Ellipsometry is an optical technique used for studies of thin films and surfaces. Bashara: Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977) Chap. The technique is based on measurement and analysis of the changes in the state of polarization that occur when polarized light is reflected on a sample surface. Internal photoemission spectroscopy correlates the energy and wavelength of photons striking a surface with the energy of emitted electrons. Theory of Ellipsometry 1 Polarized Light and EllipsometryJosef Humlíc ˇek Institute of Condensed Matter Physics, Faculty of Science Masaryk University Brno, Czech RepublicPolarization is a fundamental property of light. Georgiev G., “Structural studies of polymers and polymer liquid crystals by X-ray scattering, thermal analysis and ellipsometric studies through polarized light microscopy “ Ph.D. Thesis, TUFTS University, Medford, MA (2002). Spectroscopic ellipsometers can analyze multi-layer films or other complexly structured thin films because they can measure the polarized light condition of thin films in certain wavelength bands. The polarizer can be divided into three, namely, the linearly polarized light, ellipsometry and circularly polarized light.